Peer-reviewedPublisher termsApplied Physics Letters
Why does CO₂ plasma chamber seasoning favor nanocrystalline silicon growth?
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BibTeX
@article{newman2026does,
title = {{Why does CO₂ plasma chamber seasoning favor nanocrystalline silicon growth?}},
author = {Lunnet Yokomizo Newman and Junkang Wang and Chandralina Patra and Pavel Bulkin and Karim Ouaras and Pere Roca I Cabarrocas and Erik V Johnson},
journal = {Applied Physics Letters},
year = {2026},
month = oct,
doi = {10.1063/5.0282852},
url = {https://hal.science/hal-05805895v1},
}
RIS
TY - JOUR
TI - Why does CO₂ plasma chamber seasoning favor nanocrystalline silicon growth?
AU - Lunnet Yokomizo Newman
AU - Junkang Wang
AU - Chandralina Patra
AU - Pavel Bulkin
AU - Karim Ouaras
AU - Pere Roca I Cabarrocas
AU - Erik V Johnson
PY - 2026
DA - 2026/10/19
JO - Applied Physics Letters
DO - 10.1063/5.0282852
UR - https://hal.science/hal-05805895v1
SN - 0003-6951
SN - 1077-3118
ER -