Optical Emission Spectroscopy Applied to Plasma Magnetron Sputtering Metallic Deposition Onto Liquid at Low Pressure
Abstract
This dedicated optical emission spectroscopy (OES) study aims to improve the understanding of low-pressure sputtering onto liquids used for the production of nanoparticle (NPs) suspensions. In this work, ruthenium (Ru) nanoparticles are synthesized in polyethylene glycol contained in a glass vial positioned outside the deposition reactor. The successful application of OES at the plasma-liquid interface enabled the determination of several key parameters. The gas temperature exceeding 660 K was measured using two different approaches, namely Doppler broadening and the analysis of the OH(A X II 22 )(0-0) rotational spectra. Such values of temperature inherently enhance the PEG evaporation, which is consistent with the decrease in the energy of hydrogen species to (9.3 ± 0.2) eV above the liquid surface. This value was obtained from the analysis of the H line profile and the so-called excessive Doppler broadening. Furthermore, the electric field above the plasma-liquid interface was determined to be (29 ± 4) V/cm through measurements of the Stark shift of the Ar line at 541.047 nm. Finally, by investigating the electric field, the plasma-liquid chemistry, and the dynamic properties of the surface, this study provides new insights that contribute to a better understanding of this physical synthesis technique.
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BibTeX
@article{diop2026optical,
title = {{Optical Emission Spectroscopy Applied to Plasma Magnetron Sputtering Metallic Deposition Onto Liquid at Low Pressure}},
author = {Aïssatou Diop and Amaël Caillard and Loïc Gimenez and Sylvain Iséni},
journal = {Plasma Processes and Polymers},
year = {2026},
month = oct,
doi = {10.1002/ppap.70271},
url = {https://hal.science/hal-05841761v1},
note = {CC BY-NC 4.0},
}
RIS
TY - JOUR
TI - Optical Emission Spectroscopy Applied to Plasma Magnetron Sputtering Metallic Deposition Onto Liquid at Low Pressure
AU - Aïssatou Diop
AU - Amaël Caillard
AU - Loïc Gimenez
AU - Sylvain Iséni
PY - 2026
DA - 2026/10/28
JO - Plasma Processes and Polymers
DO - 10.1002/ppap.70271
UR - https://hal.science/hal-05841761v1
AB - This dedicated optical emission spectroscopy (OES) study aims to improve the understanding of low-pressure sputtering onto liquids used for the production of nanoparticle (NPs) suspensions. In this work, ruthenium (Ru) nanoparticles are synthesized in polyethylene glycol contained in a glass vial positioned outside the deposition reactor. The successful application of OES at the plasma-liquid interface enabled the determination of several key parameters. The gas temperature exceeding 660 K was measured using two different approaches, namely Doppler broadening and the analysis of the OH(A X II 22 )(0-0) rotational spectra. Such values of temperature inherently enhance the PEG evaporation, which is consistent with the decrease in the energy of hydrogen species to (9.3 ± 0.2) eV above the liquid surface. This value was obtained from the analysis of the H line profile and the so-called excessive Doppler broadening. Furthermore, the electric field above the plasma-liquid interface was determined to be (29 ± 4) V/cm through measurements of the Stark shift of the Ar line at 541.047 nm. Finally, by investigating the electric field, the plasma-liquid chemistry, and the dynamic properties of the surface, this study provides new insights that contribute to a better understanding of this physical synthesis technique.
SN - 1612-8850
SN - 1612-8869
ER -