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PreprintarXiv licencearXiv

Vertically-coupled microring resonators for lithium niobate on insulator integrated photonics

Abstract

We propose and demonstrate lithium niobate on insulator (LNOI) microring resonators that are verticallycoupled to index-matched silicon-rich silicon nitride (SiN x ) access waveguides as an alternative to conventional lateral coupling schemes for integrated photonics applications. The wafer-scalable fabrication process involves a planarization step exploiting a single-step and reproducible spin-coating of a SU-8 epoxy spacer layer which allows a controlled separation to be established between the resonator and its access waveguide. The resulting multimode and single-mode microring resonators exhibit, for their fundamental TE 0 mode, intrinsic quality factors of 4.0 x 10 5 and 3.4 x 10 5 , respectively.

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BibTeX
@misc{selva2026verticallycoupled,
  title = {{Vertically-coupled microring resonators for lithium niobate on insulator integrated photonics}},
  author = {Clément Selva and Sarah Umme Tabassum and Kumar Kinjalk and Adrian Laborde and Antoine Monmayrant and Olivier Gauthier-Lafaye and Stéphane Calvez},
  howpublished = {arXiv},
  year = {2026},
  month = nov,
  doi = {10.48550/arxiv.2611.09683},
  eprint = {2611.09683},
  archivePrefix = {arXiv},
  url = {https://arxiv.org/abs/2611.09683},
}
RIS
TY  - UNPB
TI  - Vertically-coupled microring resonators for lithium niobate on insulator integrated photonics
AU  - Clément Selva
AU  - Sarah Umme Tabassum
AU  - Kumar Kinjalk
AU  - Adrian Laborde
AU  - Antoine Monmayrant
AU  - Olivier Gauthier-Lafaye
AU  - Stéphane Calvez
PY  - 2026
DA  - 2026/11/06
PB  - arXiv
DO  - 10.48550/arxiv.2611.09683
UR  - https://arxiv.org/abs/2611.09683
AB  - We propose and demonstrate lithium niobate on insulator (LNOI) microring resonators that are verticallycoupled to index-matched silicon-rich silicon nitride (SiN x ) access waveguides as an alternative to conventional lateral coupling schemes for integrated photonics applications. The wafer-scalable fabrication process involves a planarization step exploiting a single-step and reproducible spin-coating of a SU-8 epoxy spacer layer which allows a controlled separation to be established between the resonator and its access waveguide. The resulting multimode and single-mode microring resonators exhibit, for their fundamental TE 0 mode, intrinsic quality factors of 4.0 x 10 5 and 3.4 x 10 5 , respectively.
ER  -