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PreprintLicence not statedChemRxiv

A reactor concept for more sustainable chemical vapor deposition of hard coatings

  • Henrik Pedersen1,2
  • Annelie Carlson3,4
  • Francis Chlavet5
  • Linus von Fieandt5,6,7
  • Tommy Larsson8
  • Oscar Alm8
  • Jonas Lauridsen8
  • Roger Nilsson9
  • Matts Karlsson3,4
  • Örjan Danielsson1,2
9 affiliations
  1. 1Department of Physics, Chemistry, and Biology
  2. 2Linköping University
  3. 3Department of Management and Engineering
  4. 4Linköping Univeristy
  5. 5Lerkrogsvägen 19, Hägersten, Sweden, SE-126 79
  6. 6Department of Chemistry – Ångström, Inorganic Chemistry
  7. 7Uppsala University
  8. 8Seco Tools AB
  9. 9Veeco SiC CVD Systems AB, Ideongatan 3A, Lund, Sweden, SE-223 70
Open at sourceDOICite

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Cite

BibTeXRIS
BibTeX
@misc{pedersen2026reactor,
  title = {{A reactor concept for more sustainable chemical vapor deposition of hard coatings}},
  author = {Henrik Pedersen and Annelie Carlson and Francis Chlavet and Linus von Fieandt and Tommy Larsson and Oscar Alm and Jonas Lauridsen and Roger Nilsson and Matts Karlsson and Örjan Danielsson},
  howpublished = {ChemRxiv},
  year = {2026},
  month = nov,
  doi = {10.26434/chemrxiv.15011760/v1},
  url = {https://chemrxiv.org/doi/full/10.26434/chemrxiv.15011760/v1},
}
RIS
TY  - UNPB
TI  - A reactor concept for more sustainable chemical vapor deposition of hard coatings
AU  - Henrik Pedersen
AU  - Annelie Carlson
AU  - Francis Chlavet
AU  - Linus von Fieandt
AU  - Tommy Larsson
AU  - Oscar Alm
AU  - Jonas Lauridsen
AU  - Roger Nilsson
AU  - Matts Karlsson
AU  - Örjan Danielsson
PY  - 2026
DA  - 2026/11/05
PB  - ChemRxiv
DO  - 10.26434/chemrxiv.15011760/v1
UR  - https://chemrxiv.org/doi/full/10.26434/chemrxiv.15011760/v1
ER  -