Peer-reviewedCC BYMaterials (Basel, Switzerland)
Toward Intelligent Chemical Mechanical Polishing: Integrating Multiscale Modeling and Machine Learning
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BibTeX
@article{anon2026toward,
title = {{Toward Intelligent Chemical Mechanical Polishing: Integrating Multiscale Modeling and Machine Learning}},
journal = {Materials (Basel, Switzerland)},
year = {2026},
month = oct,
url = {https://europepmc.org/article/PMC/PMC13666114},
note = {CC BY},
}
RIS
TY - JOUR
TI - Toward Intelligent Chemical Mechanical Polishing: Integrating Multiscale Modeling and Machine Learning
PY - 2026
DA - 2026/10/01
JO - Materials (Basel, Switzerland)
UR - https://europepmc.org/article/PMC/PMC13666114
SN - 1996-1944
ER -