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Peer-reviewedCC BYMicromachines

Atomistic Insights into Oxidation Mechanisms in Chemical–Mechanical Polishing of Diamond

  • Kechong Wang1
  • Yunkai Wang1
  • Meng Li1
  • Xiang Li1
  • Chongjun Wu2
  • Suye Hao3
  • Ningchang Wang3
  • Chen Li1
  1. 1School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China; (K.W.); (Y.W.); (M.L.); (X.L.)
  2. 2School of Mechanical Engineering, Donghua University, Shanghai 201620, China;
  3. 3State Key Laboratory for High Performance Tools, Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd., Zhengzhou 450001, China;
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Cite

BibTeXRIS
BibTeX
@article{wang2026atomistic,
  title = {{Atomistic Insights into Oxidation Mechanisms in Chemical–Mechanical Polishing of Diamond}},
  author = {Kechong Wang and Yunkai Wang and Meng Li and Xiang Li and Chongjun Wu and Suye Hao and Ningchang Wang and Chen Li},
  journal = {Micromachines},
  year = {2026},
  month = sep,
  url = {https://europepmc.org/article/PMC/PMC13707766},
  note = {CC BY},
}
RIS
TY  - JOUR
TI  - Atomistic Insights into Oxidation Mechanisms in Chemical–Mechanical Polishing of Diamond
AU  - Kechong Wang
AU  - Yunkai Wang
AU  - Meng Li
AU  - Xiang Li
AU  - Chongjun Wu
AU  - Suye Hao
AU  - Ningchang Wang
AU  - Chen Li
PY  - 2026
DA  - 2026/09/22
JO  - Micromachines
UR  - https://europepmc.org/article/PMC/PMC13707766
SN  - 2072-666X
ER  -