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Peer-reviewedPublisher termsOptics Express

High-quality multi-focus laser stealth dicing of silicon wafer via precise control of spatial focus and laser energy

  • Luo Zhang
  • Bin Liu
  • Qinghua Lv1
  • Zili Lei
  • Chenwei Zhu
  • Zhongsheng Zhai
  1. 1Hubei University of Technology
Open at sourceDOICite

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Cite

BibTeXRIS
BibTeX
@article{zhang2026highquality,
  title = {{High-quality multi-focus laser stealth dicing of silicon wafer via precise control of spatial focus and laser energy}},
  author = {Luo Zhang and Bin Liu and Qinghua Lv and Zili Lei and Chenwei Zhu and Zhongsheng Zhai},
  journal = {Optics Express},
  year = {2026},
  month = oct,
  doi = {10.1364/oe.617880},
  url = {https://opg.optica.org/abstract.cfm?URI=oe-34-22-41727},
}
RIS
TY  - JOUR
TI  - High-quality multi-focus laser stealth dicing of silicon wafer via precise control of spatial focus and laser energy
AU  - Luo Zhang
AU  - Bin Liu
AU  - Qinghua Lv
AU  - Zili Lei
AU  - Chenwei Zhu
AU  - Zhongsheng Zhai
PY  - 2026
DA  - 2026/10/22
JO  - Optics Express
DO  - 10.1364/oe.617880
UR  - https://opg.optica.org/abstract.cfm?URI=oe-34-22-41727
SN  - 1094-4087
ER  -