Peer-reviewedLicence not statedACS photonics
Sequential Multistep Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single-Molecule Fluorescence Detection
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BibTeX
@article{khelidj2026sequential,
title = {{Sequential Multistep Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single-Molecule Fluorescence Detection}},
author = {Hamza Khelidj and Badre Kerzabi and Igor Ozerov and Olivier Hector and David Grosso and Jérôme Wenger},
journal = {ACS photonics},
year = {2026},
month = jul,
doi = {10.1021/acsphotonics.6c00788},
eprint = {2607.09141},
archivePrefix = {arXiv},
url = {https://hal.science/hal-05739267v1},
}
RIS
TY - JOUR
TI - Sequential Multistep Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single-Molecule Fluorescence Detection
AU - Hamza Khelidj
AU - Badre Kerzabi
AU - Igor Ozerov
AU - Olivier Hector
AU - David Grosso
AU - Jérôme Wenger
PY - 2026
DA - 2026/07/14
JO - ACS photonics
DO - 10.1021/acsphotonics.6c00788
UR - https://hal.science/hal-05739267v1
SN - 2330-4022
ER -