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Peer-reviewedLicence not statedACS photonics

Sequential Multistep Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single-Molecule Fluorescence Detection

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BibTeX
@article{khelidj2026sequential,
  title = {{Sequential Multistep Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single-Molecule Fluorescence Detection}},
  author = {Hamza Khelidj and Badre Kerzabi and Igor Ozerov and Olivier Hector and David Grosso and Jérôme Wenger},
  journal = {ACS photonics},
  year = {2026},
  month = jul,
  doi = {10.1021/acsphotonics.6c00788},
  eprint = {2607.09141},
  archivePrefix = {arXiv},
  url = {https://hal.science/hal-05739267v1},
}
RIS
TY  - JOUR
TI  - Sequential Multistep Nanoimprint Lithography Fabrication of Zero-Mode Waveguide Nanoaperture Arrays to Enhance Single-Molecule Fluorescence Detection
AU  - Hamza Khelidj
AU  - Badre Kerzabi
AU  - Igor Ozerov
AU  - Olivier Hector
AU  - David Grosso
AU  - Jérôme Wenger
PY  - 2026
DA  - 2026/07/14
JO  - ACS photonics
DO  - 10.1021/acsphotonics.6c00788
UR  - https://hal.science/hal-05739267v1
SN  - 2330-4022
ER  -