Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes
Abstract
We present a new approach to tuning fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 mm x 2 mm drastically perturb the oscillation of the tuning fork, resulting in poor performance in its intrinsic force sensing. Therefore, restoring initial oscillatory characteristics is necessary for regaining high sensitivity. To this end, we developed a new approach consisting of three basic steps: tuning fork rebalancing, revamping holder-sensor fixation, and electrode reconfiguration. Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10⁴ in air and up to 4 x 10⁴ in ultra-high vacuum conditions. The floating-like holder-fixation using soft wires significantly reduces energy dissipation from the mounting elements. Combined with the soft wires, reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal. Finally, our easy-to-implement approach allows converting the atomic force microscopy-tip from a passive tool to a dedicated microdevice with extended functionality.
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BibTeX
@article{ciftci2026enhancing,
title = {{Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes}},
author = {H. Tunç Çiftçi and Michael Verhage and Tamar Cromwijk and Laurent Pham Van and Bert Koopmans and Kees Flipse and Oleg Kurnosikov},
journal = {Microsystems \& Nanoengineering},
year = {2026},
month = sep,
doi = {10.1038/s41378-022-00379-x},
eprint = {2202.00952},
archivePrefix = {arXiv},
url = {https://hal.science/hal-03578939v1},
note = {CC BY 4.0},
}
RIS
TY - JOUR
TI - Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes
AU - H. Tunç Çiftçi
AU - Michael Verhage
AU - Tamar Cromwijk
AU - Laurent Pham Van
AU - Bert Koopmans
AU - Kees Flipse
AU - Oleg Kurnosikov
PY - 2026
DA - 2026/09/08
JO - Microsystems & Nanoengineering
DO - 10.1038/s41378-022-00379-x
UR - https://hal.science/hal-03578939v1
AB - We present a new approach to tuning fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 mm x 2 mm drastically perturb the oscillation of the tuning fork, resulting in poor performance in its intrinsic force sensing. Therefore, restoring initial oscillatory characteristics is necessary for regaining high sensitivity. To this end, we developed a new approach consisting of three basic steps: tuning fork rebalancing, revamping holder-sensor fixation, and electrode reconfiguration. Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10⁴ in air and up to 4 x 10⁴ in ultra-high vacuum conditions. The floating-like holder-fixation using soft wires significantly reduces energy dissipation from the mounting elements. Combined with the soft wires, reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal. Finally, our easy-to-implement approach allows converting the atomic force microscopy-tip from a passive tool to a dedicated microdevice with extended functionality.
SN - 2055-7434
ER -