Selective Laser Etching technology for reconfigurable microfluidic and electrochemistry-on-chip
Abstract
Polydimethylsiloxane (PDMS) is widely used in academic microfluidics due to its favorable biocompatible properties and compatibility with soft lithography. Moreover, the recent developments of reconfigurable microfluidics rely on the microfabrication of sliding elements, which are 3D objects insertable inside a microfluidic chip to provide a given function. However, the complexity of microfluidic device geometries or sliding elements remains largely limited by the traditional microfabrication methods such as, among others, on SU-8 photolithography or dry epoxy films. Such methods are suited for simple, planar “2.5D” structures with uniform depths, yet struggle to produce more advanced architectures due to material and alignment constraints. To address these limitations, we propose to investigate advanced laser-based approaches, such as Direct Laser Writing (DLW) and Selective Laser Etching (SLE), which enable the construction of high-resolution, 3D designs. We further explore the use of SLE to fabricate sliding elements that enhance chip functionality, including chamber reconfiguration and biological sample manipulation. As a proof of concept, we show that these elements can be functionalized into pH microsensors, paving the way to reusable and reconfigurable electrochemistry-on-chip.
Related
- Microfabrication of Paul wheel trap chip in fused silica by selective laser etching
- A monolithic segmented 3D ion trap fabricated from fused silica by selective laser-induced etching
- Reconfigurable Magnetic Nanopore Platform for Selective Trapping
- Novel aptasensor coupling electrochemistry and microfluidics for the detection of luteinising hormone in fertility monitoring
- Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science
BibTeX
@article{muguet2026selective,
title = {{Selective Laser Etching technology for reconfigurable microfluidic and electrochemistry-on-chip}},
author = {Inès Muguet and David Bourrier and Pierre-François Calmon and Pierre Lapèze and Pierre Joseph and Morgan Delarue},
journal = {Micro and Nano Engineering},
year = {2026},
month = aug,
doi = {10.1016/j.mne.2026.100384},
url = {https://hal.science/hal-05789689v1},
note = {CC BY-NC-ND 4.0},
}
RIS
TY - JOUR
TI - Selective Laser Etching technology for reconfigurable microfluidic and electrochemistry-on-chip
AU - Inès Muguet
AU - David Bourrier
AU - Pierre-François Calmon
AU - Pierre Lapèze
AU - Pierre Joseph
AU - Morgan Delarue
PY - 2026
DA - 2026/08/04
JO - Micro and Nano Engineering
DO - 10.1016/j.mne.2026.100384
UR - https://hal.science/hal-05789689v1
AB - Polydimethylsiloxane (PDMS) is widely used in academic microfluidics due to its favorable biocompatible properties and compatibility with soft lithography. Moreover, the recent developments of reconfigurable microfluidics rely on the microfabrication of sliding elements, which are 3D objects insertable inside a microfluidic chip to provide a given function. However, the complexity of microfluidic device geometries or sliding elements remains largely limited by the traditional microfabrication methods such as, among others, on SU-8 photolithography or dry epoxy films. Such methods are suited for simple, planar “2.5D” structures with uniform depths, yet struggle to produce more advanced architectures due to material and alignment constraints. To address these limitations, we propose to investigate advanced laser-based approaches, such as Direct Laser Writing (DLW) and Selective Laser Etching (SLE), which enable the construction of high-resolution, 3D designs. We further explore the use of SLE to fabricate sliding elements that enhance chip functionality, including chamber reconfiguration and biological sample manipulation. As a proof of concept, we show that these elements can be functionalized into pH microsensors, paving the way to reusable and reconfigurable electrochemistry-on-chip.
SN - 2590-0072
ER -